| 학회 |
한국재료학회 |
| 학술대회 |
2019년 봄 (05/15 ~ 05/17, 평창 알펜시아 리조트) |
| 권호 |
25권 1호 |
| 발표분야 |
G. 나노/박막 재료 분과 |
| 제목 |
Improvement of Surface Properties by Plasma Surface Treatment of PDMS used as Transfer Process of Elastomer |
| 초록 |
Since the conventional Light Emitting Diodes (LEDs) is relatively large, it was possible to mount it at a desired position using the Die Bonding process. However, it is difficult to mount a Micro LEDs chip according to a conventional method. Micro LEDs has been proposed as transfer process using wafers or Polydimethylsiloxane (PDMS). Adhesion of elastomers can be an important factor in transfer processes. PDMS is widely used as an elastic material and has a relatively high adhesion property as compared with other polymer materials, but it has low surface energy. Therefore, a plasma surface treatment was carry out the experiment that improves the surface properties of the PDMS used as elastomer of the stamp. The plasma surface treatment of PDMS used Ar, O2 and N2 gas. The Contact Angle measurement implemented to confirm the change of the surface energy of the plasma treated PDMS. The effect of surface roughness with dosed plasma confirmed by AFM measurement. |
| 저자 |
강성호, 정우섭, 조승희, 이두원, 안민주, 심규연, 변동진
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| 소속 |
고려대 |
| 키워드 |
Plasma Treatment; Surface Energy; Polydimethylsiloxane; MicroLEDs
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| E-Mail |
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