| 학회 |
한국고분자학회 |
| 학술대회 |
2020년 가을 (10/05 ~ 10/08, 부산컨벤션센터(BEXCO)) |
| 권호 |
45권 1호 |
| 발표분야 |
대학원생 구두발표 (영어발표, 발표15분) |
| 제목 |
Sub-10 nm Perpendicular Lamellae of Fluoro-Acrylic Block Copolymer Films and Electric Field Induced Directed Assembly |
| 초록 |
Block copolymers (BCPs) self-assembly have attract the “bottom-up” approach lithographical applications by its districted properties of spontaneous nanoscale structures in long-range alignment with small feature down to 5 nm. We present a fluorine containing BCPs of polystyrene-b-poly(2,2,2-trifluoroethyl acrylate) (PS-b-PTFEA) which the Flory-Huggins interaction parameter (χ) is higher than the conventional polystyrene-b-poly(methyl methacrylate) (PS-b-PMMA). A neutralized substrate and top coat materials are applied where a sub-10 nm perpendicular lamellar morphology is observed with simple thermal annealing. The balanced interfacial interactions for the BCP films are tuned by overlaying neutral layers using the same monomer of the BCP with a fixed underlying neutral layer. We also demonstrate GISAXS experiment to confirm the orientation of perpendicular lamellae. Additionally, directed self-assembly (DSA) is induced by electric field resulting a long-range alignments. |
| 저자 |
조성준, 전승배, 김휘수, 류두열
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| 소속 |
연세대 |
| 키워드 |
Block copolymer; Electric-field directed assembly
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| E-Mail |
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