| 초록 |
The development of nanostructured materials has resulted in enhanced gas sensing performances as compared to bulk materials regarding to superior qualities like large surface area to volume ratio. And metal oxide semiconductor gas sensors have been used for detecting explosive and harmful gases due to advantages of properties like sensitivity, reproducibility, stability against harsh atmosphere. Among metal oxide-based sensors, zinc oxide (ZnO) based gas sensors have been widely used due to fast reponse, low detection limit, high selectivity, reliable performance and low manufacturing cost. ZnO nanostructures were fabricated using metal-organic vapor chemical vapor deposition (MOCVD) followed by electrode evaporation and rapid thermal annealing (RTA) in this work. Morphology and chemical composition of ZnO nanostructures has been figured by scanning electron microscopy (SEM) and energy dispersive x-ray spectrometer (EDS). The gas sensing characteristics have been observed investigated regarding to response of gas sensor by parameters like time, temperature, and the concentration. And the gas sensing mechasnisms and the future work for enhancing characteristics of ZnO-based gas sensors are discussed. |
