학회 |
한국고분자학회 |
학술대회 |
2012년 봄 (04/12 ~ 04/13, 대전컨벤션센터) |
권호 |
37권 1호 |
발표분야 |
기능성 고분자 |
제목 |
Manufacturing of Three-Dimensional Nanostructures via Block Copolymers |
초록 |
The self-assembly of block copolymer (BCPs) has been received wide attention because of their great potentials in lithographic applications. In this study, we synthesized BCPs, PMMA-b-P(S-r-ketene), in which 3.0 mol% of cross-linkable groups were incorporated. Then we manufactured 3-D BCP films consisting of underlying cross-linked cylinder and top lamellar layers. Interestingly, it was found that the top lamellar layer exhibited perpendicular orientations, regardless of size of D0 of underlying cylinder layer and thickness of top lamellar layer. In 3-D BCP films, thickness of perpendicular orientation, by comparison, became significantly broader than that of monolayer films. This may be due to the entropically driven nematic interactions between these two layers, and the total free energy of this system was theoretically considered. In the work, the orientation of top lamellar films as functions of film thickness and D0 of underlying cylinder layers was investigated. |
저자 |
우상훈1, 이수미2, 곽은애2, 정현중1, Frank A. LEIBFARTH3, Craig J. HAWKER3, 허준4, 류두열4, 방준하1
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소속 |
1고려대, 2삼성전자, 3UCSB, 4연세대 |
키워드 |
multilayer; 3D; block copolymer
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E-Mail |
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