| 초록 |
Activated carbon fiber (ACF) has excellent suction, desorption and purification of contaminants and can be used for plating filter for semiconductor processes. In this study, isotropic pitch was synthesized from pyrolysis fuel oil (PFO) to produce ACF for semiconductor process. The pitches were prepared by thermal polymerization and heat treated at 360, 370, 380 and 390℃ for 4 hours. Spun fibers were prepared using the prepared pitches, and stabilization conditions were determined through thermogravimetric analysis (TGA) of the fibers. The stabilized fibers were carbonized at 800℃ for 1 hour under a nitrogen atmosphere and activated using water vapor. The generated pitch and ACF were evaluated for physical properties such as softening point analysis, elemental analysis, soxhlet extraction, TGA, X-ray diffraction, etc. The comparison of physical properties is expected to result in isotropic pitch synthesis conditions for producing ACF suitable for contaminant purification. |
