| 학회 |
한국고분자학회 |
| 학술대회 |
2018년 가을 (10/10 ~ 10/12, 경주컨벤션센터) |
| 권호 |
43권 2호 |
| 발표분야 |
고분자가공/복합재료 |
| 제목 |
Total Organic Carbon Reduction for Ultrapure Water by Surface Modified Magnetic Particles and Ion-exchange Resin Micro-composite |
| 초록 |
Ultrapure water (UPW) is essential for the semiconductor manufacturing. Nitrogen containing compounds among organic substances remained in UPW changes the pH of the chemically amplified resists resulting in disturbed pattern profile during semiconductor process. Therefore, it is important to reduce the amount of total organic carbon (TOC) in UPW. Here, we introduce a micro-composite composed of magnetic (Fe3O4) nanoparticles (NPs) and microbeads of ion-exchange resin (IER) to reduce TOC. Magnetic NPs were surface-modified with vinyltriethoxysilane (VTES) and then physicochemically adsorbed on the microbeads of IER. Both of the VTES treated on the surface of the magnetic NPs and the micro-composite were probed through XPS, SEM, and TGA. And, from the TOC test using the micro-composite we observed the tendency of TOC variation. |
| 저자 |
박지현1, 이정준2, 김보현1, 박동혁3, 이선종1
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| 소속 |
1한국생산기술(연), 2성균관대, 3인하대 |
| 키워드 |
ultrapure water; magnetic particles; ion-exchange resin; micro-composites; total organic carbon; surface modified
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| E-Mail |
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