화학공학소재연구정보센터
학회 한국재료학회
학술대회 2010년 가을 (11/11 ~ 11/12, 무주리조트)
권호 16권 2호
발표분야 F. Display and optic Materials and processing(디스플레이 및 광 재료)
제목 ANTIMONY SURFACTANT EFFECT ON GREEN EMISSION InGaN/GaN MULTI QUANTUM WELLS GROWN BY MOCVD
초록 An improvement in the optical and structural properties of green emitting InGaN/GaN Multi Quantum Wells (MQWs) was obtained by using antimony (Sb) as a surfactant during InGaN growth. Keeping the growth conditions for InGaN constant, Sb was introduced during InGaN growth while varying the [Sb]/([In]+[Ga]) flow ratio from 0 to 0.16%. The analysis results suggest that using the optimum [Sb]/([In]+[Ga]) ratio (0.04%-0.1%) during InGaN growth greatly improves the optical and structural properties of the MQWs without incorporating much Sb into the growing film and that the emission wavelength is also maintained with a slight blue shift.
저자 이영곤1, Giri Sadasivam Karthikeyan1, 백광선1, 이준기2
소속 1전남대, 2전남대 신소재공학과
키워드 Sb surfactant; InGaN/GaN MQW growth
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