| 초록 |
Recent progress in carbon nanotube field-effect transistors (CNTFETs) has demonstrated single-molecule sensing in the biofluid withoutchemical labeling step; however, technology has been only lab-based unit deviceprototypes due to the poor device yield. Precise assembly, placement, andintegration of a single CNT in the fabrication process have been significantdrivers to develop this technology into a large-scale array platform forhigh-throughput analysis. We present a single CNT assembled device array usingthe inkjet printing process on the 4-inch silicon wafer, yielding 35 chips. Onepico-liter of purified CNT ink is uniformly spotted onto the 79 electrode pairsin each sensor chip, placing a single CNT across the one-micron electrode gapat 37% yield. Devices show uniform semiconducting characteristics in the liquidinterface. This additive manufacturing process is simple, inexpensive, rapid, andtransferring this technology into commercial applications. |
