| 학회 |
한국재료학회 |
| 학술대회 |
2017년 가을 (11/15 ~ 11/17, 경주 현대호텔) |
| 권호 |
23권 2호 |
| 발표분야 |
G. 나노/박막 재료 분과 |
| 제목 |
Chemical Composite on Characteristics of Thin Film on PET substrate prepared by using ECR-CVD |
| 초록 |
Composite films of highly transparent and low electrical resistivity were prepared with Electron Cyclotron Resonance chemical vapor deposition (ECR-CVD) system in order to study the effects of deposition parameters on the characteristics of these films. ECR-CVD method was employed to prepared composite films on PET (Polyethylene Terephthalate) substrate under an Ar-O2-H2 atmosphere using TMT (tetramethyltin) and DEZn(diethylzinc) precursors. The Sn and Zn react with oxide radicals and chemical binding from the decomposition of TMT and DEZn, respectively. The chemical binding energy of Sn and Zn to O in the film as determined by XPS analysis was chemical binding of ZnSnOx of films, respectively. All films were highly resistive independent of deposition conditions used. The obtained SnO2-ZnO thin films exhibited over 90 % of optical transmittance at wavelength range from 380 to 780 nm and c.a. 5.7×10-3 ohm •cm of electrical resistivity. |
| 저자 |
Chung Yeol Ye1, Jin Ki Roh2, Ji Hun Park1
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| 소속 |
1IM R&D Display Group, 2IM R&D |
| 키워드 |
ECR-CVD; composite film; electrical resistivity; transmittance
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| E-Mail |
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