학회 |
한국고분자학회 |
학술대회 |
2003년 가을 (10/10 ~ 10/11, 부경대학교) |
권호 |
28권 2호, p.120 |
발표분야 |
고분자 구조 및 물성 |
제목 |
Synchrotron X-ray Reflectivity Studies on the Structures of Nanoporous Organosilicate Thin Films |
초록 |
It was comprehensively conducted that the structure studies for the thin films made of a polymethylsilsesquioxane films containing a star-shaped poly(ε-caprolactone) and their derived porous analogs. The films were spin-casted on the silicon substrates and subsequently cured at various temperatures. Synchrotron x-ray reflectivity for those films was measured and the measured data were calculated by a hierarchical fitting procedure. The precise electron densities of the films were determined from the critical angles of the total reflections around low angles. And it was discussed that the average electron densities of the films and the properties of skin layers in the same films were changed with the variations of curing temperature and initial porogen loadings. The relationship between the porosities of porous films and initial porogen loadings was also discussed. In addition, the surface morphologies of the films were investigated from the observed AFM images and it was found that the cross sectional morphology of the porous film obtained from TEM image was uniform through the thickness direction. |
저자 |
오원태1, 황용택2, 박영희3, 이문호4
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소속 |
1포항공과대, 2고분자(연), 3기능성분자집합체연구센타, 4분자생명과학부BK21사업단 |
키워드 |
x-ray reflectivity; nanopore; thin film
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E-Mail |
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