| 초록 |
Research regarding controlled buckling of thin films on compliant substrates has been used to advantage in diverse fields. These buckled surfaces are generally formed on thin hard skin/soft foundation bilayer systems. We deposit Al thin film on a UV-curable prepolymer. We can obtain high aspect ratio of buckling resulting from viscoelastic property of substrate. Also, a large deformation possibly occurs, folding which involve highly localized curvature appears too. We represent a relation between amplitude of folding and thickness of polymer substrate through scaling analysis. Thickness of polymer substrate can be easily set by spin-coating because prepolymer is nearly liquid state. From this result, we can control size or orientation of buckling and folding on patterned substrates. Moreover, after curing prepolymer layer, we can use these buckled surface to make replica in soft lithography. |
