| 학회 | 한국공업화학회 |
| 학술대회 | 2020년 가을 (10/28 ~ 10/30, 광주 김대중컨벤션센터(Kimdaejung Convention Center)) |
| 권호 | 24권 1호 |
| 발표분야 | 포스터-디스플레이 |
| 제목 | Optimization of Material and Process Method for Non-Laser Lift-off Technique Development |
| 초록 | The production of next-generation wearable electronic devices requires the manufacture of electronic devices on flexible substrates, and in order to produce reliable electronic devices on flexible substrates, polyimide (PI), a key substrate material, must be coated on the carrier substrates, manufactured and detached through PI Lift-off technology. Currently, Lift-off technology is mainly made up of Laser Lift-off (LLO), which uses excimer laser, but expensive consumable parts require a lot of maintenance and repair. In addition, it is hard to make a large area in principle because it uses the line scan method. In this study, the lift-off technique of the area scan method using the xenon flash lamp and the Light to heat conversion layer (LTHC) without the using excimer laser, and a study to establish PI materials and spin coating process conditions for optimal lift-off process efficiency were investigated. |
| 저자 | 이상일, 한영준, 이준엽, 김도엽, 장성현, 최준, 조관현 |
| 소속 | 한국생산기술(연) |
| 키워드 | Lift-off; polyimide; LTHC; flexible display |
