| 초록 |
As the number of gas sensor applications increases, electronic nose (E-nose) was suggested to overcome the conventional gas sensor's selectivity bottleneck. Through pattern extraction from high performing sensor arrays, numerous gases in sub parts per million (ppm) concentration could be discriminated. However, since the fabrication of high performing sensing arrays have been significantly limited because of the time-consuming and non-universal processes, the development of rational E-nose fabrication system with superior sensing performance, processability, homogeneity, and material versatility is required. Here in, unique polymer based top-down lithography which fulfill aforementioned requirements is developed to build high performing gas sensing arrays. Five metal oxide nanopatterns (NiO, CuO, Cr2O3, SnO2, WO3) were fabricated into E-nose system (aspect ratio of 11; width : 14nm, height : 150nm) and successfully distinguish seven different disease biomarker gases (5 ppm). This method provides innovative system to build E-nose with superior sensitivity, processability, homogeneity and material versatility that can be applied to various applications including breath diagnosis. |
