화학공학소재연구정보센터
학회 한국화학공학회
학술대회 2005년 가을 (10/21 ~ 10/22, 인하대학교)
권호 11권 2호, p.1880
발표분야 분리기술
제목 공기로부터 고순도 산소 생산을 위한 PVSA 공정 최적화 연구
초록 A three-bed PVSA process with two equilibrium beds and one kinetic bed was developed to overcome the 94% O2 purity restriction inherent to air separation in the adsorption process. To produce 97+% and/or 99+% purity O2 directly from air, the PVSA process was executed at 0.33-0.45 to 2.5 atm. In addition, the effluent gas from the CMS bed to be used for O2 purification was backfilled to the zeolite 10X bed to improve its purity, recovery and productivity in bulk separation of the air.
In this study, to improve and optimize the cyclic performance of three-bed PVSA process, a parametric study was also done by experimental and theoretical works. The optimization of PR and AD step times of CMS bed was executed to improve both the performance of equilibrium and kinetic separation beds. As a consequence, the high purity O2 of around 97% with high recovery of around 75% and the productivity of around 5.8ⅹ10-5 cm3/g∙sec was produced at properly determined operating condition.
저자 지정근1, 김민배2, 이상훈3, 문흥만3, 이창하2
소속 1삼성전자주식회사 반도체총괄 메모리사업부, 2연세대, 3대성산업가스(주) 초저온 (연)
키워드 High purity O2; PVSA; CMS; zeolite 10X
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