| 학회 |
한국재료학회 |
| 학술대회 |
2008년 봄 (05/22 ~ 05/23, 상록리조트) |
| 권호 |
14권 1호 |
| 발표분야 |
제 14회 신소재 심포지엄 - 故김기배 박사 추모 심포지엄 |
| 제목 |
초급냉 기술에 의한 나노구조 후막 코팅 시 비행 액적과 코팅재의 열이력 해석 |
| 초록 |
A numerical and experimental studies on the coating process were executed in order to know how to tailor process conditions to produce protective coatings on the parts of semi-conductor fabrication equipments having promising physical properties and visual aspect. As a coating materials Y2O3 powder was adopted which is commonly used as a coating materials for semiconductor industry. Self coded program was used for the calculation of thermal and kinetic behavior of in-flight droplet(powder) and in-line observation system was used for measuring the velocity and temperature of in-flight droplets. From the numerical and experimental analysis, how to reduce the black spots formed are suggested. |
| 저자 |
석현광 |
| 소속 |
한국과학기술(연) |
| 키워드 |
thermal spray; rapid cooling; in-flight droplet; thermal behavior
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| E-Mail |
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