| 학회 | 한국재료학회 |
| 학술대회 | 2016년 가을 (11/16 ~ 11/18, 경주 현대호텔) |
| 권호 | 22권 2호 |
| 발표분야 | H. 한-일 재료공학 워크샵 |
| 제목 | Materials engineering of functional thin films deposited onto polyester film substrate |
| 초록 | Polymer surface modification and coating technologies are indispensable for improvement of polymer functions [1]. It is well known that polyethylene terephthalate (PET) is one of representative engineering plastics, and the PET film has an excellent optical transparency, heat resistance and mechanical properties. The PET film is employed for a substrate of thin films prepared by physical vapor deposition, i.e., vacuum evaporation and sputtering, and these laminates (thin film / PET film substrate) are employed in various industries. In this paper, new and enhanced functions due to the coating of metal, inorganic and organic thin films prepared by the vacuum evaporation and sputtering on the PET film substrate are revealed. Tin(Sn) and Zinc(Zn) alloy thin films were deposited on PET film substrate by co-evaporation and evaluated their tensile and adhesion properties with a vacuum forming test and pull test. The Sn–Zn alloy (Sn:Zn = 85:15 wt%) thin film had high vacuum forming durability, which would relate with size and cohesion of grain boundary [2]. A new transparent gas barrier material based on silicon oxynitride (SiON) has been developed and characterized. The film has been deposited on the PET substrate via reactive sputtering in nitrogen plasma. The gas barrier properties of this material exhibit the following features [3]; (1) The oxygen transmission rate of the SiON films is lower than that of the silicon oxide film. (2) The SiON film has a fine and amorphous structure without pinholes or cracks. A fluorocarbon thin film was deposited onto a polyester (PET) film substrate by an r.f. sputtering, and characterized their optical property. The visible light transmittance of PET film substrate improves due to the coating of the fluorocarbon thin film, which suggests that the PET film coated with the fluorocarbon thin film can be used for antireflection films. The structure of the fluorocarbon thin film is suggested to be amorphous and it is considered that this is one of the reasons why the fluorocarbon thin films sputtered with the PTFE target become transparent [4]. REFERENCES [1] Polymer Surface Modification and Polymer Coating by Dry Process Technologies, Ed. S. Iwamori, RESEARCH SIGNPOST, India, 2005. [2] S. Iwamori, T. Kita, S. Saitoh, S. Yano, K. Kaminoda, S. Ohnishi, K. Suzuki, “Adhesion and vacuum forming properties of tin–zinc thin films deposited on polyester film substrate”, Vacuum, Vol. 84, pp.581-586, 2009. [3] S. Iwamori, Y Gotoh, K.Moorthi, “Characterization of silicon oxynitride gas barrier films”, Vacuum, Vol. 68, pp. 113-117, 2002. [4] S. Iwamori, K. Noda, “Optical property of fluorocarbon thin films deposited onto polyester film substrate by an r.f. sputtering”, Materials Letters, Vol. 66, pp.349-352, 2012. |
| 저자 | Satoru IWAMORI |
| 소속 | Tokai Univ. |
| 키워드 | polyethylene terephthalate (PET); deposition; tin (Sn) – zinc (Zn) alloy thin film; silicon oxynitride (SiON) thin film; fluorocarbon thin film. |
