화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2008년 봄 (04/10 ~ 04/11, 컨벤션 뷰로(대전))
권호 33권 1호
발표분야 신기능 나노표면, 계면 및 박막
제목 Lithography using Block copolymer Baroplasticity
초록 Block copolymers with baroplasticity could be easily processed at a lower pressure. In this work, polystyrene-block-poly(n-pentyl methacrylate)[PS-b-PnPMA] was used for the nano patterning by Atomic force microscope (AFM). Comparison with other polymers indicates that high density pattern with nanometer sizes was achieved from PS-b-PnPMA thin film at room temperature. This could be used for a high-density data storage application using 2 bites (0 and 1). Acknowledgement: This work was supported by Creative Research Initiative Program supported by KOSEF
저자 조아라, 주원철, 김진곤
소속 포항공대
키워드 Lithography; Block copolymer; Baroplasticity
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