| 초록 |
Synchrotron grazing incidence X-ray scattering (GIXS) has several important advantages over transmission X-ray and neutron scattering as well as scanning and transmission electron microscopies. For these advantages, in recent years the GIXS has become the major analytical tool for characterizing structures, interfaces and properties of a variety of nanostructures and nanoscale thin films in a single and multilevels. We have newly developed a GIXS theory and its data analysis method. In our study GIXS measurements with synchrotron radiation sources were conducted statically and in-situ for a series of nanoscale thin films prepared from nanoporous dielectrics, block copolymers, brush polymers, and molecular assemblies. The measured scattering data were analyzed in detail by using the newly developed GIXS scattering theory. |
