| 초록 |
In this study, the self-assembly of block copolymers (BCPs) were used to achieve long-range ordered nanostructures. Firstly, uniaxially aligned grating patterns were fabricated on substrates by rubbing process with the poly(tetrafluoroethylene) (PTFE) and these patterns were applied to attain the well-controlled BCP nanostructures in thin films. The thin films of polystyrene-block-poly(2-vinylpyridine) copolymer are prepared on the PTFE grating patterns. The P2VP cylinders oriented perpendicular to the surface were obtained by solvent annealing. It was observed that the grain size was dramatically increased since they are effectively guided along the underlying PTFEs. The well-ordered BCP nanostructures are also utilized as templates to generate uniform array of various nanoparticles such as silica, gold, silver and platinum. Furthermore, it was found that BCP nanostructures, which were oriented parallel to the surface of the PTFEs, can be utilized as an etching mask for dry etching. |
