| 학회 |
한국화학공학회 |
| 학술대회 |
2000년 봄 (04/21 ~ 04/22, 한양대학교) |
| 권호 |
6권 1호, p.1849 |
| 발표분야 |
재료 |
| 제목 |
액적화학증착법을 이용하여 제조한 (Pb, Sr)TiO3 박막의 특성분석 |
| 초록 |
The physical and electrical properties of lead-strontium-titanate (PST) thin films prepared for the first time by liquid source misted chemical deposition are reported. The crystallinity of PST thin film was greatly improved by heat treatment at 500oC for 5minutes in an air atmosphere after deposition of each layer. The composition and depth profile of PST film were uniform. The dielectric constant and dielectric loss of Pb0.36Sr0.62TiO3 films of 90nm thickness were 337 and 0.04, respectively. The lowest leakage current density of 5.5x10-6 A/cm2 at 1V was obtained. It can be concluded that PST can be used as a high capacity material for ULSI DRAM capacitor.
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| 저자 |
정현진, 우성일
|
| 소속 |
한국과학기술원 |
| 키워드 |
(Pb; Sr)TiO3; LSMCD; DRAM capacitor
|
| E-Mail |
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| 원문파일 |
초록 보기 |
