| 학회 |
한국고분자학회 |
| 학술대회 |
2009년 가을 (10/08 ~ 10/09, 광주과학기술원 오룡관) |
| 권호 |
34권 2호 |
| 발표분야 |
기능성 고분자 |
| 제목 |
Nanofabrication with Self-Patterning Hybrid Materials |
| 초록 |
Block copolymers have been studied extensively as a self-patterning material in thin films. They also have been used as a structure directing material for functional materials to generate well-defined nanostructures. Here we present nanofabrication of structures applicable to electronic devices using a self-patterning block copolymer containing hybrid. The hybrid material employed in this study is mixtures of an amphiphilic diblock copolymer, poly(styrene-b-ethylene oxide) (PS-b-PEO), and a low molecular weight precursor of organosilicate (OS). To apply this self-patterning hybrid material to fabricate nanostructures of device layouts, we employed topographic guiding patterns on the substrates with controlled chemical properties of the surface. We report the basic design rules for controlling the alignment of lamellar microdomains of the hybrid with specific examples of device layouts for nanoelectronics. |
| 저자 |
Sang-Min Park, Ho-Cheol Kim
|
| 소속 |
IBM-Almaden Research Center |
| 키워드 |
Block copolymer hybrid; self-assembly
|
| E-Mail |
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