| 학회 | 한국재료학회 |
| 학술대회 | 2021년 가을 (11/24 ~ 11/26, 경주 라한호텔) |
| 권호 | 27권 2호 |
| 발표분야 | G. 나노/박막 재료 분과 |
| 제목 | Direct In-situ Synthesis of TMD/Oxides Multi-Heterostructures by Sequential Pulsed Laser Deposition |
| 초록 | Van der Waals (vdW) materials arouse an unprecedented level of interest due to their different properties from traditional bulk materials. Transition metal dichalcogenides (TMDs) are versatile semiconductors that can be used field-effect transistor (FET), optoelectronic devices, and so on because of their band gap that varies depending on the number of layers. Notably, multi-heterostructures (MHs) TMDs layers combined with metal oxide have gained significant attention to investigate their emergent phenomena and easily coupled to other existing electronic systems without being bound by lattice-matched. Despite this advantage of MHs-TMDs combined with metal oxides, the fabrication of MHs-TMDs has been significantly challenging using conventional methods thus far due to the need for iterative manual tasks and two-step processes. Compared to these other methods, sequential pulsed laser deposition (PLD) enables continuously stack various types of materials without additional transfer process at low temperatures and growth rate can control by the pulse rate of the laser to form a TMD films faster. Herein, we fabricated centimeter-scale in-situ MHs TMDs such as WSe2/MoS2, CeO2/MoS2, and CeO2/WSe2/MoS2 on SiO2/Si substrates via PLD with multi-target carousels system. We performed X-ray photoelectron spectroscopy (XPS) and Raman spectrum analysis to observe the phase and compositions of TMDs heterostructures. Additionally, the distinct interface of each layer in heterostructures was verified via transmission electron microscopy (TEM) and energy dispersive spectroscopy (EDS) mapping. We believe that our research might be a cornerstone for developing new synthesis approaches of various TMD/oxides heterostructures to realization of functional devices. |
| 저자 | 오인혁, 이상한 |
| 소속 | 광주과학기술원 |
| 키워드 | transition metal dichalcogenides; molybdenum sulfides; tungsten selenides; cerium oxide; pulsed laser deposition; heterostructure. |
