| 초록 |
Fabrication of more complex and diverse geometries, not line or dot patterns, has attracted much attention. Among them, ring-shaped patterns can be used to fabrication of photo catalytic, sensors. Generally, since AB diblock copolymers are limited to make only simple topographical features, ring-shaped patterns have been formed from linear ABC triblock terpolymers. However, there is a limitation because it can only be obtained by solvent vapor annealing. Here, in order to overcome this limitation, we changed the chain architecture of block copolymers(BCPs) from linear to star-shape. We synthesized star-shaped 6-arm poly(methyl metacrylate)-block-polystyrene copolymers (PMMA-b-PS)6. The PMMA volume fraction (fPMMA) is fixed at 0.50. Also, we studied the effect of film thickness, the annealing conditions, enthalpy and entropy effect to fabricate the ring-shaped patterns. In this work, we present a new strategy for fabrication of sub-50nm diameter nanoring array using star BCPs. |
