초록 |
Semiconductor industry requires a sophisticated chilling system to effectively control the process temperature. A process is designed to meet the refrigeration needs of ultra-low temperature chilling system. The required temperature, to be achieved, is -70℃. This temperature can be achieved by adopting a mixed refrigerant utilizing, preferably, refrigerants with low global warming potential and low ozone depletion potential in a simple and efficient configuration. The single mixed refrigeration cycle is simulated in Aspen Hysys to study the behavior of coolant (HFE-7500) and refrigeration cycle. The UNIQUAC thermodynamic package is opted for HFE-7500 properties calculation while Peng Robinson is selected for refrigerants (R-507 and ethylene). The HFE-7500 is not available in Aspen Hysys data base. These components were added using molecular structure and thermophysical properties. The MITA value is kept 3℃. The results show low SEC of 0.042 kWh/kg and COP value of 0.12. |