| 학회 | 한국재료학회 |
| 학술대회 | 2021년 가을 (11/24 ~ 11/26, 경주 라한호텔) |
| 권호 | 27권 2호 |
| 발표분야 | A. 전자/반도체 재료 분과 |
| 제목 | Heterogeneous integration of single-crystalline rutile nanomembranes with steep phase transition on silicon substrates |
| 초록 | Heteroepitaxial growth of single-crystal oxide films provide promise for emerging electronics and photonics due to the intriguing phenomena (e.g., metal-insulator transition (MIT), high-electron mobility, ferroelectricity) exhibited by these ionic crystals. However, integration of emergent functionality from single-crystal oxide films in mature device platforms is restricted by many parameters such as crystal structure, lattice mismatch, high-temperature process. Therefore, unrestricted integration of single-crystal oxide films on arbitrary substrates has been of great interest to exploit emerging phenomena for practical applications. Here, we present a general method to integrate of correlated oxides on dissimilar substrates with utilizing a freestanding single-crystalline rutile oxide nanomembranes (NMs) as an epitaxial template1. By selective oxidation and dissolution of sacrificial VO2 buffer layers from TiO2/VO2/TiO2 by dilute H2O2 solution, millimeter-size TiO2 single-crystalline layers are integrated on silicon substrate without any deterioration. After subsequent VO2 epitaxial growth on the transferred TiO2 NM, we create artificial single-crystalline oxide/Si heterostructures with excellent sharpness of metal-insulator transition (∆ρ/ρ ＞ 103) even in ultrathin (＜10 nm) VO2 films that are not achievable via direct growth on Si due to the formation of defective interfacial layers. This discovery will provide a unique opportunity for designing a variety of artificial heterostructures by stacking and growth of multi-functional single-crystal oxide NMs. [1] Lee, D. K. Heterogeneous integration of single-crystalline rutile nanomembranes with steep phase transition on silicon substrates. Nat. Commun. 12, 1-8 (2021). |
| 저자 | Dong Kyu Lee1, Junwoo Son2 |
| 소속 | 1Department of Materials Science and Engineering (MSE), 2Pohang Univ. of Science and Technology (POSTECH) |
| 키워드 | <P>Metal-Insulator transition; nanomembrane; single crystal; correlated oxide</P> |
