화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2011년 가을 (10/06 ~ 10/07, 김대중 컨벤션센터)
권호 36권 2호
발표분야 Polymer Directed Assembly
제목 Fabrication of various silicon nanostructures via nanopatterned polymer lithography
초록 We present a new technique to fabricate a highly ordered silicon pin-in-a-hole structure, in which each silicon nanowire is pinned in a hole, by combining polymer sphere arrays induced by Rayleigh instability with chemical etching process. With this process, we were able to create the novel sructures that are periodic over large areas (3 x 3 cm2), where the length of silicon nanowires can be varied by tuning the etching time. A silicon pin-in-a-hole structure was used as templates for preparing polymer nanotubes. And also these structures exhibited a superior anti-reflection property showing specular reflectance of about 0.2%, nearly three orders of magnitude lower than that of a planar silicon wafer.
저자 박수진
소속 울산과학기술대
키워드 Polymer lithography; Silicon pattern
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