화학공학소재연구정보센터
학회 한국공업화학회
학술대회 2019년 가을 (10/30 ~ 11/01, 제주국제컨벤션센터(ICC JEJU))
권호 23권 2호
발표분야 (특별세션) 제13회 반도체공정진단 워크숍(반도체공정/소재)
제목 Atomic layer deposition of two dimensional semiconducting materials and their applications
초록 Two dimensional (2D) transition metal dischalcogenides (TMDCs) have attracted great attention as low dimensional semiconducting materials. 2D TMDCs have shown exotic electronic and optical properties: Indirect-to-direct bandgap transition with reducing number of layers, high carrier mobility and strong spin-orbit coupling due to their broken inversion symmetry. Despite of their remarkable properties, however, the studies on the synthesis of 2D TMDCs are still showing various limitations in layer controllability, large area uniformity. Thus, the focus of our research is to understand and control the growth of 2D TMDCs based on atomic layer deposition (ALD) and to apply to electronic and optical devices. In this talk, I will present the synthesis of 2D TMDCs using ALD process. Furthermore, potential applications of 2D TMDCs, including field effect transistors (FET), gas sensor, PN diode, and photodetector, will be introduced.
저자 송정규
소속 삼성종합기술원
키워드 2D TMDCs; semiconducting materials
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