화학공학소재연구정보센터
학회 한국공업화학회
학술대회 2022년 봄 (05/11 ~ 05/13, 제주국제컨벤션센터(ICC JEJU))
권호 26권 1호
발표분야 포스터-무기재료
제목 Suitable compositions for accurate replication of metasurfaces with decreased swelling of a PDMS mold
초록 Nanoprintlithography has overcome the existing limitations of nanofabrication, whichhave been a major obstacle to the application of metasurfaces. However, the commercializationof metasurfaces requires a one-step fabrication method. A single process fabricationof a metahologram using a nanoparticle-embedded resin was implemented. With thereusability of the intermediate soft mold, metasurfaces can be repeatedlyreproduced with only a single step printing without any additional work. MIBKis mainly used as a solvent for synthesizing nanoparticle composite, but itcauses PDMS, which is used as a soft mold, to swell. This defect in fabricationdue to inflated molds can cause spectral changes, which makes it unreliable todetect through the metasurface that supports the binding state in thecontinuum. Here, to reduce the swelling of the mold, we propose an appropriateformulation using an acrylate ester-based monomer/ketone solvent and replicatethe metasurface more accurately.
저자 전나라, 오동교, 정충환, 김재경, 노준석
소속 포항공과대
키워드 Particle embedded resin; Nanoimprinting; PDMS swelling; Metasurface
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