화학공학소재연구정보센터
학회 한국재료학회
학술대회 2021년 가을 (11/24 ~ 11/26, 경주 라한호텔)
권호 27권 2호
발표분야 G. 나노/박막 재료 분과
제목 Fast probing of ferroelectric polarization charge using AFM-PUND
초록 Ferroelectric materials are used in various fields such as information technology, sensor and energy harvesting because of their spontaneous polarization. In recent, as the sizes of devices and materials become smaller, measurement of the ferroelectrics at the nanoscale becomes more important. Recently, conductive atomic force microscopy (AFM) based technique, which is called AFM-positive-up-negative-down (PUND), has been utilized for evaluation of ferroelectricity. Most AFM-PUND measurements have limited to relatively low frequencies. However, measurement at a high frequency is required in order to increase the signal-to-noise ratio. In this presentation, we introduced AFM-PUND with continuous type waveform for signal acquisition at high frequencies. We obtained P-V hysteresis loops up to 100 kHz frequency in BiFeO3 nanocapacitor. In addition, measurements in Hf0.5Zr0.5O2 showed that AFM-PUND can be applied to emerging materials as well as well-known ferroelectrics. The proposed methods can give the comprehensively evaluation of ferroelectricity at the nanoscale with AFM.
저자 Owoong Kwon1, Seunghun Kang2, Sanghyun Jo1, Yun Do Kim2, Hee Han3, Yeehyun Park4, Xiaoli Lu5, Woo Lee6, Marin Alexe7, Yunseok Kim8
소속 1School of Advanced Materials and Engineering, 2Sungkyunkwan Univ., 3Samsung Advanced Institute of Technology, 4Suwon 16678, 5Republic of Korea, 6Department of Nano Science, 7Univ. of Science and Technology, 8National Nano Fab Center
키워드 Atomic force microscopy (AFM); Positive-up-negative-down(PUND); polarization charge; HfO<SUB>2</SUB> based ferroelectrics
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