| 초록 |
In this work, a nanopatterned electrical silicon biosensor is fabricated by BCP lithography and is used for the selective detection of similar structure model proteins. A cost-effective and large-area nanofabrication, based on BCP self-assembly and single-step dry etching, is developed for the hexagonal nanohole pattering of thin silicon films. The resultant nanopatterned electrical channel modified with biotin molecules successfully detects the two proteins, streptavidin and avidin down to nanoscale molarities (~1 nM). The nanoscale pattern comparable to Debye screening length and its large surface area of three-dimensional silicon nano-channel enable the biosensor to realize excellent sensitivity and stability. This nanofabrication based on scalable self-assembly approaches with a simple process offers a high throughput manufacturing route for clinical lab-on-a-chip diagnosis and relevant bimolecular studies |
