화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2013년 봄 (04/11 ~ 04/12, 대전컨벤션센터)
권호 38권 1호
발표분야 고분자구조 및 물성
제목 Perpendicular lamellar orientation of Block Copolymers over 100-nm Periods
초록 Directed assembly of block copolymer thin films is widely used for nanoscopic templates or scaffolds. A key challenge in this field is to attain the well-developed structure of assembly with more than 100-nm period, because the ordering of long-chained block copolymer is hindered by the very slow chain mobility. We demonstrated a ordering evolution for the thin films of high molecular weight block copolymer assembly on a neutral substrate with the solvent annealing, which was combinatorially developed by the thermal annealing process. This breakthrough strategy, which is applicable to nanolithographic pattern transfer to target materials, suggests a simple and fast route to the demand for the larger feature size of block copolymer assembly.
저자 김은혜1, 안형주2, 박성민2, 이호연2, 이문규3, 이수미3, 허준2, 방준하4, 한영수1, 류두열2
소속 1한국원자력(연), 2연세대, 3삼성디스플레이, 4고려대
키워드 block copolymer; solvent annealing; line pattern
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