| 학회 | 한국재료학회 |
| 학술대회 | 2021년 가을 (11/24 ~ 11/26, 경주 라한호텔) |
| 권호 | 27권 2호 |
| 발표분야 | E. 환경/센서 재료 분과 |
| 제목 | Gas sensing properties of CoxSy thin films |
| 초록 | For detecting toxic and dangerous gases transition-metal oxide semiconductors have been widely studied for the application in gas sensors. Since, among various materials, cobalt sulfides have rarely been studied for gas sensor application, in this work, gas sensing properties of cobalt sulfide thin films were investigated. CoxSy thin films were synthesized by a two-step process using thermal evaporation. Co3O4 thin films were prepared by the first evaporation. Subsequently, CoxSy thin films were synthesized through sulfidation processes. We have optimized processing temperature and time for the preparation of the CoxSy thin films, leading to the modulation of thickness and morphology of thin films. Also, the amount of precursor and sulfur was controlled to change the film thickness and morphology. Finally, gas sensing characteristics of cobalt sulfide thin films were evaluated and demonstrated. To elucidate the relationship among thickness, morphology and gas sensing characteristics, structural characterization has been performed by field-emission scanning electron microscopy (FE-SEM), X-ray diffraction (XRD) method, Raman spectroscopy, etc. This work was supported by the National Research Foundation of Korea (NRF) grant funded by the Korea Government (MSIT) (no. 2019R1G1A1006231). |
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| 키워드 | Co<SUB>x</SUB>S<SUB>y</SUB>; Gas sensing |
