초록 |
A new capacitive-type humidity sensor is proposed using novel materials and fabrication process for practical applications in sensitive environments functional devices. Perovskites combined with diverse ceramics are selected as sensing materials, and nanocomposite powders are deposited by aerosol deposition (AD) process. CsPb2Br5/BaTiO3 nanocomposite humidity sensor exhibits a significant increase in humidity sensing compared with CsPbBr3/TiO2 sensors. An outstanding humidity sensitivity (21426 pF RH%−1) with superior linearity (0.991), fast response/recovery time (5 s), low hysteresis of 1.7%, and excellent stability in a wide range of relative humidity is obtained owing to a highly porous structure, effective charge separation, and water-resistant characteristics of CsPb2Br5. |