| 초록 |
Directed self-assembly (DSA) of high-χ block copolymer (BCP)s has many advantages including its scalability to smaller than 10 nm and superior pattern quality compared to low-χ BCPs. However, conventional solvent annealing which is effective method for high-x BCPs requires the use of a rather complicated treatment system. Herein, we introduce ultrafast and highly simplified in-situ DSA implementation based on thermally-assisted warm spin-casting (WSC), which exempts the requirement of a subsequent annealing step. This advancement is based on the BCPs with large phase-separation driving force as well as the thermal assistance provided by optimized degree of temperature elevation. We demonstrate well-ordered sub-10 nm half-pitch DSA patterns obtained by 40°C spin-casting for only 30 sec without additional annealing process. This thermally-assisted casting strategy may suggest a new route for highly productive and functional assembly solutions for variety of nanoscale building blocks. |
