| 초록 |
Self-assembly in block-copolymers (BCPs) has great promise for use in nanolithography and assembly of nanomaterials, with demonstrated capabilities in fabrication of nanoscale devices. For the practical applications, the rapid, high-resolution method for patterning BCPs with different molecular weights and compositions across a wafer surface, with complex geometries and diverse feature sizes are required. Here, we fabricated the diverse patterns of BCPs based on poly(styrene-block-methyl methacrylate) with various molecular weights and compositions by using electrohydrodynamic jet priting technique. Upon thermally annealing on bare or on chemically or topographically structured substrates, such printed patterns yielded nanodomains of BCPs in well-defined sizes, periodicities and orientations, with overall layouts that span dimensions from nanometers to centimeters. |
