| 학회 |
한국재료학회 |
| 학술대회 |
2009년 봄 (05/21 ~ 05/22, 무주리조트) |
| 권호 |
15권 1호 |
| 발표분야 |
전자재료 |
| 제목 |
TEMPERATURE DEPENDENT PROPERTIES OF SPRAY DEPOSITED ITO THIN FILMS |
| 초록 |
Sprayed indium tin oxide (ITO) thin films synthesized by mixing adequate quantities of ethanolic solutions of indium trichloride and stannic chloride at different substrate temperatures. X-ray diffraction (XRD) results showed that the films are polycrystalline with cubic structure and exhibit preferential orientation along (222) plane. The SEM and AFM studies indicated that the surface morphology of the samples increase with substrate temperature. The pyrolytic decomposition ‘Pd’ and surface mobility ‘Sm’ are found to affect on the properties and morphology of ITO samples. The film deposited at 5000C shows perfectly cubic grains and has carrier concentration of 3.26 x 1020cm-3 and mobility of 9.77 cm2/Vs with highest figure of merit of is 4.4x10-3 Ω−1. Optical absorption studies reveal that films are highly transparent (T ＞90 %) in the visible region and band gap increases with substrate temperature owing to Moss-Burstein effect. |
| 저자 |
A.V. Moholkar1, S.M. Pawar2, K.Y. Rajpure3, C.H. Bhosale4, J.H. Kim5
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| 소속 |
1Department of Physics, 2Gopal Krishna Gokhale College, 3Kolhapur 416 0012, 4M.S., 5India |
| 키워드 |
Indium doped tin oxide (ITO) thin films; Spray pyrolysis; X-ray diffraction; Scanning electron microscopy; Electrical properties
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| E-Mail |
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