| 초록 |
Ultrahigh density array of TiO2 naotubes aligned vertically with on a substrate are prepared as follows. 1) Amic acid in N-Methylpyrrolidone was spin-coated on various substrates (silicon wafer or ITO-coated glass) and stepwise curing process to give polyimide film. 2) By placing an alumina oxide (AAO) membrane on the polyimide film, reactive ion etching (RIE) was performed. 3) TiO2 naotubes were fabricated by atomic layer deposition, and the wall thickness of the nanotubes depends on the deposition time. 4) polyimide film was finally removed by RIE. We found that the adhesion between polyimde film and substrates was excellent. Furthermore, vertically aligned TiO2 nanotubes were maintained on the substrate after the removal of polyimide film by RIE. |
