| 초록 |
Carbon dioxide is one of common gases used as a reactant, an intermediate, and a final product in chemical, biomedical, energy and food industries. Carbon dioxide is colorless and odorless, and its density is higher than air. This may cause a significant impact on human life and work environment, so it is important to detect the CO2 accurately. Recently, the demand for CO2 sensors increases with the development of IoT technology in order to reduce the risk of high concentration CO2 exposure and to monitor air quality in daily life. Among semiconductor based gas sensors, GaN-based gas sensors have excellent reliability and sensitivity. In this study, AlGaN/GaN HEMT (high electron mobility transistor) based CO2 sensor using ZnO nanorods was fabricated. The device showed the best sensitivity at 300℃, and fast and accurate reactivity to various concentrations of CO2. |
