검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Oxynitridation-Enhanced Diffusion of Phosphorus in (100) Silicon Chen NK, Lee C Journal of the Electrochemical Society, 142(6), 2051, 1995 |
| 2 |
Shallow Boron-Doped Layer Formation by Boron-Diffusion from Poly-Si Through Thin SiO2 Miyake M Journal of the Electrochemical Society, 141(6), 1702, 1994 |
| 3 |
Effects of Cl Incorporation During Si Oxidation Stepniak F, Weaver JH Journal of Vacuum Science & Technology B, 12(5), 3031, 1994 |