검색결과 : 2건
No. | Article |
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1 |
Three-dimensional polymer structures fabricated by reversal ultraviolet-curing imprint lithography Kehagias N, Zelsmann M, Torres CMS, Pfeiffer K, Ahrens G, Gruetzner G Journal of Vacuum Science & Technology B, 23(6), 2954, 2005 |
2 |
Impact of residual layer uniformity on UV stabilization after embossing Wissen M, Schulz H, Bogdanski N, Scheer HC, Hirai Y, Kikuta H, Ahrens G, Reuther F, Glinsner T Journal of Vacuum Science & Technology B, 22(6), 3224, 2004 |