검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
GaAs surface passivation by plasma-enhanced atomic-layer-deposited aluminum nitride (vol 256, pg 7434, 2010) Bosund M, Mattila P, Aierken A, Hakkarainen T, Koskenvaara H, Sopanen M, Airaksinen VM, Lipsanen H Applied Surface Science, 257(6), 2412, 2011 |
| 2 |
Properties of AlN grown by plasma enhanced atomic layer deposition Bosund M, Sajavaara T, Laitinen M, Huhtio T, Putkonen M, Airaksinen VM, Lipsanen H Applied Surface Science, 257(17), 7827, 2011 |
| 3 |
GaAs surface passivation by plasma-enhanced atomic-layer-deposited aluminum nitride Bosund M, Mattila P, Aierken A, Hakkarainen T, Koskenvaara H, Sopanen M, Airaksinen VM, Lipsanen H Applied Surface Science, 256(24), 7434, 2010 |
| 4 |
Investigation of sub-nm ALD aluminum oxide films by plasma assisted etch-through Grigoras K, Franssila S, Airaksinen VM Thin Solid Films, 516(16), 5551, 2008 |
| 5 |
Fabrication of Sub-100 nm GaAs Columns by Reactive Ion Etching Using Au Islands as Etching Mask Ahopelto J, Airaksinen VM, Siren E, Niemi HE Journal of Vacuum Science & Technology B, 13(1), 161, 1995 |