검색결과 : 7건
| No. | Article |
|---|---|
| 1 |
Performance improvement of diamondlike carbon membrane masks for electron projection lithography Amemiya I, Yamashita H Journal of Vacuum Science & Technology B, 23(2), 370, 2005 |
| 2 |
Technique for estimating the angle of incidence and depth of focus of an electron beam Mizuno F, Amemiya I, Taniguchi K Journal of Vacuum Science & Technology B, 23(6), 3052, 2005 |
| 3 |
Lithographic performance of diamond-like carbon membrane mask in electron projection lithography Yamashita H, Amemiya I, Yamabe M, Arimoto H Journal of Vacuum Science & Technology B, 22(6), 3067, 2004 |
| 4 |
Complementary exposure of 70 nm SoC devices in electron projection lithography Yamashita H, Amemiya I, Takeuchi K, Masaoka H, Takahashi K, Ikeda A, Kuroki Y, Yamabe M Journal of Vacuum Science & Technology B, 21(6), 2645, 2003 |
| 5 |
Fabrication of a continuous diamondlike carbon membrane mask for electron projection lithography Amemiya I, Yamashita H, Nakatsuka S, Tsukahara M, Nagarekawa O Journal of Vacuum Science & Technology B, 21(6), 3032, 2003 |
| 6 |
Fabrication of complete 8 in stencil mask for electron projection lithography Amemiya I, Yamashita H, Nakatsuka S, Kimura I, Tsukahara M, Yasumatsu S, Nagarekawa O Journal of Vacuum Science & Technology B, 20(6), 3010, 2002 |
| 7 |
Complementary mask pattern split for 8 in stencil masks in electron projection lithography Yamashita H, Takahashi K, Amemiya I, Takeuchi K, Masaoka H, Takenaka H, Yamabe M Journal of Vacuum Science & Technology B, 20(6), 3015, 2002 |