검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Newly developed electron beam stepper for nanoimprint mold fabrication Okada M, Kishiro T, Yanagihara K, Ataka M, Anazawa N, Matsui S Journal of Vacuum Science & Technology B, 28(4), 740, 2010 |
| 2 |
Completion of the beta tool and the recent progress of low energy e-beam proximity projection lithography Endo A, Higuchi A, Nozue H, Shimazu N, Fukui T, Yasumitsu N, Miyatake T, Anazawa N Journal of Vacuum Science & Technology B, 21(1), 311, 2003 |