화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Grazing incidence x-ray fluorescence and secondary ion mass spectrometry combined approach for the characterization of ultrashallow arsenic distribution in silicon
Pepponi G, Giubertoni D, Bersani M, Meirer F, Ingerle D, Steinhauser G, Streli C, Hoenicke P, Beckhoff B
Journal of Vacuum Science & Technology B, 28(1), C1C59, 2010
2 Fabrication of As-doped p-type ZnO thin films using As2O3 as doping source material by E-beam evaporation
Kumar M, Choi SY
Applied Surface Science, 255(5), 2173, 2008