검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Atomic Vapor Depositions of Ti-Ta-O thin films for Metal-Insulator-Metal applications Lukosius M, Kaynak CB, Wenger C, Ruhl G, Rushworth S, Baumann P Thin Solid Films, 519(11), 3831, 2011 |
| 2 |
High performance metal-insulator-metal capacitors with atomic vapor deposited HfO2 dielectrics Lukosius M, Walczyk C, Fraschke M, Wolansky D, Richter H, Wenger C Thin Solid Films, 518(15), 4380, 2010 |