검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Kinetic Monte Carlo simulation for semiconductor processing: A review Martin-Bragado I, Borges R, Balbuena JP, Jaraiz M PROGRESS IN MATERIALS SCIENCE, 92, 1, 2018 |
| 2 |
Lattice kinetic Monte Carlo simulation of epitaxial growth of silicon thin films in H-2/SiH4 chemical vapor deposition systems Balbuena JP, Martin-Bragado I Thin Solid Films, 634, 121, 2017 |