검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Real-Time, Noninvasive Temperature Control of Wafer Processing Based on Diffusive Reflectance Spectroscopy Wang ZZ, Kwan SL, Pearsall TP, Booth JL, Beard BT, Johnson SR Journal of Vacuum Science & Technology B, 15(1), 116, 1997 |
| 2 |
In-Situ Wafer Temperature Monitoring of Silicon Etching Using Diffuse-Reflectance Spectroscopy Booth JL, Beard BT, Stevens JE, Blain MG, Meisenheimer TL Journal of Vacuum Science & Technology A, 14(4), 2356, 1996 |