검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
A review of ion projection lithography Melngailis J, Mondelli AA, Berry IL, Mohondro R Journal of Vacuum Science & Technology B, 16(3), 927, 1998 |
| 2 |
Economic and technical case for ion projection lithography Berry IL Journal of Vacuum Science & Technology B, 16(4), 2444, 1998 |
| 3 |
Fabrication and characterization of buried subchannel implant n-metal-oxide-semiconductor transistors Wang W, McCarthy D, Park D, Ma D, Marrian C, Peckerar M, Goldsman N, Melngailis J, Berry IL Journal of Vacuum Science & Technology B, 16(6), 3812, 1998 |
| 4 |
Programmable aperture plate for maskless high-throughput nanolithography Berry IL, Mondelli AA, Nichols J, Melngailis J Journal of Vacuum Science & Technology B, 15(6), 2382, 1997 |
| 5 |
Novel Electrostatic Column for Ion Projection Lithography Chalupka A, Stengl G, Buschbeck H, Lammer G, Vonach H, Fischer R, Hammel E, Loschner H, Nowak R, Wolf P, Finkelstein W, Hill RW, Berry IL, Harriott LR, Melngailis J, Randall JN, Wolfe JC, Stroh H, Wollnik H, Mondelli AA, Petillo JJ, Leung K Journal of Vacuum Science & Technology B, 12(6), 3513, 1994 |
| 6 |
Experimental Investigation of Stochastic Space-Charge Effects on Pattern Resolution in Ion Projection Lithography Systems Hammel E, Chalupka A, Fegerl J, Fischer R, Lammer G, Loschner H, Malek L, Nowak R, Stengl G, Vonach H, Wolf P, Brunger WH, Buchmann LM, Torkler M, Cekan E, Fallmann W, Paschke F, Stangl G, Thalinger F, Berry IL, Harriott LR, Finkelstein W, Hill RW Journal of Vacuum Science & Technology B, 12(6), 3533, 1994 |