검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
The Effect of the Ti Glue Layer in an Integrated Ti/Tin/Ti/Alsicu/Tin Contact Metallization Process Ouellet L, Tremblay Y, Gagnon G, Caron M, Currie JF, Gujrathi SC, Biberger M Journal of Vacuum Science & Technology B, 14(4), 2627, 1996 |
| 2 |
Effect of the Ti/Tin Bilayer Barrier and Its Surface-Treatment on the Reliability of a Ti/Tin/Alsicu/Tin Contact Metallization Ouellet L, Tremblay Y, Gagnon G, Caron M, Currie JF, Gujrathi SC, Biberger M Journal of Vacuum Science & Technology B, 14(6), 3502, 1996 |
| 3 |
Collimated Ti/Tin Contact and Barrier Layers for Sub 0.5 Mu-M CVD W-Filled Contact Holes Biberger M, Jackson S, Tkach G, Schlueter J, Jones B, Huang CK, Ouellet L Thin Solid Films, 270(1-2), 522, 1995 |