검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Electrical property improvements of yttrium oxide-based metal-insulator-metal capacitors Durand C, Vallee C, Dubourdieu C, Kahn M, Derivaz M, Blonkowski S, Jalabert D, Hollinger P, Fang Q, Boyd IW Journal of Vacuum Science & Technology A, 24(3), 459, 2006 |
| 2 |
Metal-insulator-metal capacitors using Y2O3 dielectric grown by pulsed-injection plasma enhanced metalorganic chemical vapor deposition Durand C, Vallee C, Loup V, Salicio O, Dubourdieu C, Blonkowski S, Bonvalot M, Holliger P, Joubert O Journal of Vacuum Science & Technology A, 22(3), 655, 2004 |